- Title
- An optimization framework for the design of piezoelectric AFM cantilevers
- Creator
- Moore, Steven Ian; Ruppert, Michael G.; Yong, Yuen Kuan
- Relation
- Precision Engineering Vol. 60, p. 130-142
- Publisher Link
- http://dx.doi.org/10.1016/j.precisioneng.2019.08.005
- Publisher
- Elsevier
- Resource Type
- journal article
- Date
- 2019
- Description
- To facilitate further miniaturization of atomic force microscopy (AFM) cantilevers and to eliminate the standard optical beam deflection sensor, integrated piezoelectric actuation and sensing on the chip level is a promising option. This article presents a topology optimization method for dynamic mode AFM cantilevers that maximizes the sensitivity of an integrated piezoelectric sensor under stiffness and resonance frequency constraints. Included in the formulation is a new material model C-SIMP (connectivity and solid isotropic material with penalization) that extends the SIMP model to explicitly include the penalization of unconnected structures. Example cantilever designs demonstrate the potential of the topology optimization method. The results show, firstly, the C-SIMP material model significantly reduces connectivity issues and, secondly, arbitrary cantilever topologies can produce increases in sensor sensitivity or resonance frequency compared to a rectangular topology.
- Subject
- atomic force microscopy; topology optimization; piezoelectric cantilevers; connectivity penalization; sensitivity analysis; microsystems
- Identifier
- http://hdl.handle.net/1959.13/1407320
- Identifier
- uon:35719
- Identifier
- ISSN:0141-6359
- Rights
- © 2019 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
- Language
- eng
- Full Text
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